リアクティブスパッタリングは、メタルスパッタリングとプラズマガス反応を融合した PVD プロセスコーティング方法です。MicroDyn® と呼ばれるコーティング装置で、優れた高温安定性と高精度のコーティングを提供します。
| Coating Materials |
|---|
| Silicon oxide |
| Niobium oxide |
| Zirconium oxide |
| Titanium oxide |
| Tantalum oxide |
| Hafnium oxide |
| Iron and iron oxide |
| Substrates |
|---|
| Technical glasses |
| Optical glasses |
| Ceramic |
| Plastics (PC) |
| Aluminum |
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