Reactive Sputtering is a PVD process that combines metal sputtering with a reactive gas plasma. For this technology MicroDyn® machines are used that enable highly temperature stable, precision coatings.
| Materials |
|---|
| Silicon oxide |
| Niobium oxide |
| Zirconium oxide |
| Titanium oxide |
| Tantalum oxide |
| Hafnium oxide |
| Iron and iron oxide |
| Substrates |
|---|
| Technical glasses |
| Optical glasses |
| Ceramic |
| Plastics (PC) |
| Aluminum |
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