反应溅射是一种将金属溅射与反应气体等离子体相结合的 PVD 过程。Auer专利 ®MICRODYN 镀膜设备的使用另镀膜层精密并高温下工作稳定。
| 镀膜材料 |
|---|
| 氧化硅 |
| 氧化铌 |
| 氧化锆 |
| 氧化钛 |
| 氧化钽 |
| 氧化铪 |
| 铁及铁氧化物 |
| 基材 |
|---|
| 工业技术玻璃 |
| 光学玻璃 |
| 陶瓷 |
| 塑料 (PC) |
| 铝 |
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